@inproceedings{bec0c4496a5f407aacba29130ee4a488,
title = "Modeling and Experimental Verification of Coupled Beam Arrays for Mass Sensing",
abstract = "In this article, we create a mathematical representation of an electrostatic resonator consisting of interconnected beams and explore its potential application in mass detection. We perform experiments on a three-beam system to validate the model's predictive accuracy, and the numerical outcomes align qualitatively with the experimental findings. The numerical results reveal the feasibility of adjusting electrostatic actuation to amplify the sensitivity of the coupled MEMS resonator's dynamic response to mass variations through mode localization. This study showcases how the intricate dynamics of coupled beams under electrostatic actuation can be harnessed to enhance the performance of mass sensors significantly.",
keywords = "Coupled beams, mass sensing, mode localization, veering",
author = "Mehdi Ghommem and Fehmi Najar and Toky Rabenimanana and Vincent Walter and Najib Kacem",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024 ; Conference date: 02-05-2024 Through 05-05-2024",
year = "2024",
doi = "10.1109/NEMS60219.2024.10639939",
language = "English",
series = "2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024",
address = "United States",
}