Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition
- Y. Awad
- , M. A. El Khakani
- , D. Brassard
- , R. Smirani
- , N. Camiré
- , M. Lessard
- , C. Aktik
- , M. Scarlete
- , J. Mouine
- Université de Sherbrooke
- SiXtron Advanced Materials Inc.
- Institut national de la recherche scientifique
- Bishop's University
Research output: Contribution to journal › Article › peer-review
12
Scopus
citations