Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition

  • Y. Awad
  • , M. A. El Khakani
  • , D. Brassard
  • , R. Smirani
  • , N. Camiré
  • , M. Lessard
  • , C. Aktik
  • , M. Scarlete
  • , J. Mouine

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

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