A 108-dB DR 103-dB SNR Delay-Time Chopper Stabilization Audio CT ΔΣ Modulator

J. Nebhen, P. M. Ferreira, S. Mansouri, M. Masmoudi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper presents a low-noise MNEMS microphone. The resistive accelerometer and the electronic interface are respectively a silicon nanowires and a fourth-order single-bit Continuous-Time (CT) ΔΣ modulator. The study and analysis of the MNEMS microphone noise is carefully reported. To eliminate the offset and 1/f noise of the first integrator, Chopper Stabilization (CHS) technique is implemented around this block. The CT ΔΣ modulator is implemented in a 65-nm CMOS technology. The supply voltage is 1.2-V while the power consumption is 370-μW and the core area is 0.4-mm2. The circuit was fabricated and measured. From measurement results over a signal bandwidth of 20-kHz, it achieves a peak signal-to-noise ratio (SNR) of 103-dB, a peak signal-to-noise and distortion ratio (SNDR) of 102-dB and a dynamic range (DR) of 108-dB.

Original languageEnglish
Title of host publicationDTS 2020 - IEEE International Conference on Design and Test of Integrated Micro and Nano-Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728154282
DOIs
StatePublished - Jun 2020
Event2020 IEEE International Conference on Design and Test of Integrated Micro and Nano-Systems, DTS 2020 - Hammamet, Tunisia
Duration: 7 Jun 202010 Jun 2020

Publication series

NameDTS 2020 - IEEE International Conference on Design and Test of Integrated Micro and Nano-Systems

Conference

Conference2020 IEEE International Conference on Design and Test of Integrated Micro and Nano-Systems, DTS 2020
Country/TerritoryTunisia
CityHammamet
Period7/06/2010/06/20

Keywords

  • Amplifier
  • Chopper stabilization
  • Low-noise
  • MEMS
  • ΔΣ modulator

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