Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Yassir Arezki; Rong Su; Ville Heikkinen; François Leprete; Pavel Posta; Youichi Bitou; Christian Schober; Charyar Mehdi-Souzani; Bandar Abdulrahman Mohammed Alzahrani; Xiangchao Zhang; Yohan Kondo; Christof Pruss; Vit Ledl; Nabil Anwer; Mohamed Lamjed Ben Youssef Bouazizi; Richard Leach; Hichem Nouira

doi:10.3390/s21041103

Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Yassir Arezki, Rong Su, Ville Heikkinen, François Leprete, Pavel Posta, Youichi Bitou, Christian Schober, Charyar Mehdi-Souzani, Bandar Abdulrahman Mohammed Alzahrani, Xiangchao Zhang, Yohan Kondo, Christof Pruss, Vit Ledl, Nabil Anwer, Mohamed Lamjed Ben Youssef Bouazizi, Richard Leach, Hichem Nouira

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

Original language	English
Article number	1103
Pages (from-to)	1-19
Number of pages	19
Journal	Sensors
Volume	21
Issue number	4
DOIs	https://doi.org/10.3390/s21041103
State	Published - 2 Feb 2021

Keywords

Aspheric and freeform optical elements
Dimensional metrology
Measured data evaluation
Robust reference minimum zone (Hybrid Trust Region) fitting
Ultra-high precision measuring machine
Uncertainty

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10.3390/s21041103

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Arezki, Y., Su, R., Heikkinen, V., Leprete, F., Posta, P., Bitou, Y., Schober, C., Mehdi-Souzani, C., Alzahrani, B. A. M., Zhang, X., Kondo, Y., Pruss, C., Ledl, V., Anwer, N., Ben Youssef Bouazizi, M. L., Leach, R., & Nouira, H. (2021). Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level. Sensors, 21(4), 1-19. Article 1103. https://doi.org/10.3390/s21041103

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abstract = "The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.",

keywords = "Aspheric and freeform optical elements, Dimensional metrology, Measured data evaluation, Robust reference minimum zone (Hybrid Trust Region) fitting, Ultra-high precision measuring machine, Uncertainty",

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Arezki, Y, Su, R, Heikkinen, V, Leprete, F, Posta, P, Bitou, Y, Schober, C, Mehdi-Souzani, C, Alzahrani, BAM, Zhang, X, Kondo, Y, Pruss, C, Ledl, V, Anwer, N, Ben Youssef Bouazizi, ML, Leach, R & Nouira, H 2021, 'Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level', Sensors, vol. 21, no. 4, 1103, pp. 1-19. https://doi.org/10.3390/s21041103

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AU - Su, Rong

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AU - Posta, Pavel

AU - Bitou, Youichi

AU - Schober, Christian

AU - Mehdi-Souzani, Charyar

AU - Alzahrani, Bandar Abdulrahman Mohammed

AU - Zhang, Xiangchao

AU - Kondo, Yohan

AU - Pruss, Christof

AU - Ledl, Vit

AU - Anwer, Nabil

AU - Ben Youssef Bouazizi, Mohamed Lamjed

AU - Leach, Richard

AU - Nouira, Hichem

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AB - The design of innovative reference aspheric and freeform optical elements was investi-gated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the val-ues of form error. Agreement among the results of several partners was observed, which demon-strates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

KW - Aspheric and freeform optical elements

KW - Dimensional metrology

KW - Measured data evaluation

KW - Robust reference minimum zone (Hybrid Trust Region) fitting

KW - Ultra-high precision measuring machine

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Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Abstract

Keywords

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