Tailoring the structural and optical properties of next-generation aluminum nitride thin films using CO2 laser-assisted RF sputtering

  • Chang Hyeon Jo
  • , Yoon Young Huh
  • , Gwangseop Lee
  • , Mohsin Saleem
  • , Rizwan Ahmed Malik
  • , Ali Hasnain
  • , Jung Hyuk Koh

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

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