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Structural and mechanical properties of amorphous silicon carbonitride films prepared by vapor-transport chemical vapor deposition
Y. Awad, M. A. El Khakani, C. Aktik, J. Mouine, N. Camiré, M. Lessard, M. Scarlete, H. A. Al-Abadleh, R. Smirani
Research output: Contribution to journal › Article › peer-review
48
Scopus
citations