Structural and mechanical properties of amorphous silicon carbonitride films prepared by vapor-transport chemical vapor deposition

  • Y. Awad
  • , M. A. El Khakani
  • , C. Aktik
  • , J. Mouine
  • , N. Camiré
  • , M. Lessard
  • , M. Scarlete
  • , H. A. Al-Abadleh
  • , R. Smirani

Research output: Contribution to journal › Article › peer-review

48 Scopus citations

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