Structural analysis of silicon carbon nitride films prepared by vapor transport-chemical vapor deposition

Y. Awad, M. A. El Khakani, M. Scarlete, C. Aktik, R. Smirani, N. Camiŕ, M. Lessard, J. Mouine

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Fingerprint

Dive into the research topics of 'Structural analysis of silicon carbon nitride films prepared by vapor transport-chemical vapor deposition'. Together they form a unique fingerprint.

Material Science