Fingerprint
Dive into the research topics of 'Resistless electron beam lithography process for the fabrication of sub-50 nm silicide structures'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Resistless electron beam lithography process for the fabrication of sub-50 nm silicide structures
D. Drouin, J. Beauvais, E. Lavallée, S. Michel, J. Mouine, R. Gauvin
Research output: Contribution to journal › Article › peer-review
11
Scopus
citations