Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation

E. Abdel-Fattah

doi:10.1016/j.physleta.2012.11.014

Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation

E. Abdel-Fattah

Physics

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

The influence of excitation frequency (13.56-96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 60 mTorr at a fixed discharge voltage V_pp=200 V. The measured electron energy distribution function EEPFs are a bi-Maxwellian type irrespective of the driving frequency and gas pressure. The electron density and temperatures show peak over frequency range of 54-72 MHz, beyond which it decreases. The non-monotonic dependences of plasma parameters with driving frequency were interpreted in terms of excited surface wave excited at the powered electrode.

Original language	English
Pages (from-to)	297-302
Number of pages	6
Journal	Physics Letters, Section A: General, Atomic and Solid State Physics
Volume	377
Issue number	3-4
DOIs	https://doi.org/10.1016/j.physleta.2012.11.014
State	Published - 3 Jan 2013

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

Capacitively coupled plasma
Electron energy distribution function
Surface wave plasma
Very high frequency

Access to Document

10.1016/j.physleta.2012.11.014

Cite this

@article{3982b065c6e64ba5be8e0d9ef8dbcd07,

title = "Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation",

abstract = "The influence of excitation frequency (13.56-96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 60 mTorr at a fixed discharge voltage Vpp=200 V. The measured electron energy distribution function EEPFs are a bi-Maxwellian type irrespective of the driving frequency and gas pressure. The electron density and temperatures show peak over frequency range of 54-72 MHz, beyond which it decreases. The non-monotonic dependences of plasma parameters with driving frequency were interpreted in terms of excited surface wave excited at the powered electrode.",

keywords = "Capacitively coupled plasma, Electron energy distribution function, Surface wave plasma, Very high frequency",

author = "E. Abdel-Fattah",

year = "2013",

month = jan,

day = "3",

doi = "10.1016/j.physleta.2012.11.014",

language = "English",

volume = "377",

pages = "297--302",

journal = "Physics Letters, Section A: General, Atomic and Solid State Physics",

issn = "0375-9601",

publisher = "Elsevier B.V.",

number = "3-4",

}

TY - JOUR

T1 - Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation

AU - Abdel-Fattah, E.

PY - 2013/1/3

Y1 - 2013/1/3

N2 - The influence of excitation frequency (13.56-96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 60 mTorr at a fixed discharge voltage Vpp=200 V. The measured electron energy distribution function EEPFs are a bi-Maxwellian type irrespective of the driving frequency and gas pressure. The electron density and temperatures show peak over frequency range of 54-72 MHz, beyond which it decreases. The non-monotonic dependences of plasma parameters with driving frequency were interpreted in terms of excited surface wave excited at the powered electrode.

AB - The influence of excitation frequency (13.56-96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 60 mTorr at a fixed discharge voltage Vpp=200 V. The measured electron energy distribution function EEPFs are a bi-Maxwellian type irrespective of the driving frequency and gas pressure. The electron density and temperatures show peak over frequency range of 54-72 MHz, beyond which it decreases. The non-monotonic dependences of plasma parameters with driving frequency were interpreted in terms of excited surface wave excited at the powered electrode.

KW - Capacitively coupled plasma

KW - Electron energy distribution function

KW - Surface wave plasma

KW - Very high frequency

UR - https://www.scopus.com/pages/publications/84871031397

U2 - 10.1016/j.physleta.2012.11.014

DO - 10.1016/j.physleta.2012.11.014

M3 - Article

AN - SCOPUS:84871031397

SN - 0375-9601

VL - 377

SP - 297

EP - 302

JO - Physics Letters, Section A: General, Atomic and Solid State Physics

JF - Physics Letters, Section A: General, Atomic and Solid State Physics

IS - 3-4

ER -

Investigation of capacitively coupled argon plasma driven at various frequencies and validation of surface waves excitation

Abstract

UN SDGs

Keywords

Access to Document

Other files and links

Fingerprint

Cite this