Graphene-based MEMS devices for gas sensing applications: A review

Microelectromechanical systems (MEMS) that utilize graphene-based materials have gained significant attention for gas-sensing applications owing to their unique properties. Graphene is a two-dimensional sheet of carbon atoms arranged in a hexagonal lattice that exhibits exceptional mechanical strength, high electrical conductivity, and large surface area. These properties make graphene an ideal candidate for gas sensing applications. In this study, we examined the fundamental characteristics of graphene, with emphasis on its practical use in sensors. We explored the latest techniques for synthesizing graphene, highlighting the importance of continual advancements in these manufacturing processes which are crucial for bringing graphene-based products to the market. We present various examples of how graphene is employed in MEMS for mass/gas sensing applications and discuss the advantages and challenges associated with devices using these materials. For successful incorporation of these materials into MEMS systems, it is essential to establish effective designs and integration processes that yield high results. Additionally, this analysis delves into the latest developments in graphene-based solid-state and movable MEMS devices, highlighting their promising gas-sensing applications.