Electron heating mode transition observed in a very high frequency capacitive discharge

E. Abdel-Fattah; H. Sugai

doi:10.1063/1.1604941

Electron heating mode transition observed in a very high frequency capacitive discharge

E. Abdel-Fattah
, H. Sugai

Nagoya University

Research output: Contribution to journal › Article › peer-review

78 Scopus citations

Abstract

An investigation on the effect of excitation frequency in the 13.56-60 MHz range on the electron energy distribution function (EDF) of capacitively coupled plasma was presented. A remarkable change in the EDF was observed, under a fixed rf voltage and argon pressure. It was found that with increasing rf voltage, the transition frequency decreased.

Original language	English
Pages (from-to)	1533-1535
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	8
DOIs	https://doi.org/10.1063/1.1604941
State	Published - 25 Aug 2003
Externally published	Yes

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title = "Electron heating mode transition observed in a very high frequency capacitive discharge",

abstract = "An investigation on the effect of excitation frequency in the 13.56-60 MHz range on the electron energy distribution function (EDF) of capacitively coupled plasma was presented. A remarkable change in the EDF was observed, under a fixed rf voltage and argon pressure. It was found that with increasing rf voltage, the transition frequency decreased.",

author = "E. Abdel-Fattah and H. Sugai",

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AU - Sugai, H.

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N2 - An investigation on the effect of excitation frequency in the 13.56-60 MHz range on the electron energy distribution function (EDF) of capacitively coupled plasma was presented. A remarkable change in the EDF was observed, under a fixed rf voltage and argon pressure. It was found that with increasing rf voltage, the transition frequency decreased.

AB - An investigation on the effect of excitation frequency in the 13.56-60 MHz range on the electron energy distribution function (EDF) of capacitively coupled plasma was presented. A remarkable change in the EDF was observed, under a fixed rf voltage and argon pressure. It was found that with increasing rf voltage, the transition frequency decreased.

UR - https://www.scopus.com/pages/publications/0042281658

U2 - 10.1063/1.1604941

DO - 10.1063/1.1604941

M3 - Article

AN - SCOPUS:0042281658

SN - 0003-6951

VL - 83

SP - 1533

EP - 1535

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 8

ER -

Electron heating mode transition observed in a very high frequency capacitive discharge

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