Bulk micromachining of a MEMS tunable Fabry-Perot interferometer: Effect of residual silicon on device performance

  • Rohit Srivastava
  • , U. Gururaj Shenoy
  • , Scott R. Forrest
  • , S. Chinnayelka
  • , Javeed Shaikh Mohammed
  • , Ronald S. Besser
  • , Michael J. McShane

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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