Atmospheric pressure spatial atomic layer deposition of p-type CuO thin films from copper(ii) acetylacetonate and ozone for UV detection

Hung Anh Tran Vu, Duc Trung Pham, Hang Tran Thi My, Duc Anh Duong, Abdullah H. Alshehri, Van Tan Tran, Thi Minh Hien Nguyen, De Pham-Cong, Viet Huong Nguyen

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